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Sensorwell
MCS100 Mass Flow Sensor
The model MCS100 is a compact and fast response mass flow sensor created from original MEMS sensor technology with millions of shipments.
By combining a thermal MEMS sensor and a low pressure loss flow path, this flow sensor can measure Air, Nitrogen and Oxygen* flow under 10L/min with 5ms fast response, which can also detect flow direction or slight flow rate changes.
* Fluid conditions for use with Oxygen : supply pressure 50 kPa or less, concentration 95% or less.
- Can measure mass flow rate according to the standard condition (20℃, 1 atm) of gas without temperature nor pressure compensation.
- Small and light weight which can be installed wherever, it’s suited for a variety of flow measurements in such as laboratory and various industry applications.
(33.5 x 10.5 x 17.0 mm, just 9g, without cable) - Fast response time : 5ms
- Bidirectional flow range
- Low power consumption: 12mA max. at 24Vdc
- Free mounting position and not required straight piping length
Measurement flow range line-up
![Glaph1](https://www.azbil.com/products/factory/factory-product/flowmeter/mass-flow-sensor/mcs100/images/Glaph1.gif)
![Glaph2](https://www.azbil.com/products/factory/factory-product/flowmeter/mass-flow-sensor/mcs100/images/Glaph2.gif)
One-way flow range
- MCS100A104 : 0 to 3L/min
- MCS100A112 : 0 to+500mL/min
- MCS100A116 : 0 to 5L/min
- MCS100A120 : 0 to 10L/min
Bidirectional flow range
- MCS100A100 : -3 to +3 L/min
- MCS100A108 : -500 to +500mL/min
- MCS100A128 : -10 to +10L/min
Construction specification
- Material Parts contacted to gas : PPS resin, Ceramic (printed wiring board), Brass (piping connection), Cover : PC resin
- Piping connection : M5 female (brass insertion)
- Operating temperature range : 0 to 50℃
- Operating pressure range : -70 to 200kPa
- Pressure resistance : 300kPa
Typical applications
Control of suction flow rate in air volume samplers, gas detectors, etc.
- Measures the mass flow rate intake of the pump without effects from temperature fluctuation or changes in atmospheric pressure.
- Operates on battery power on handheld equipment.
Control or monitoring of supply flow rate for oxygen concentrators, etc.
- Useful for control of oxygen flow rate from compressor, without effects from fluctuation in room temperature or altitude.
- Useful for replacing from a float meter.
Monitoring of purge rate or cooling flow rate for wire bonders, etc.
- Measures flow rate of air supplied to eliminate heat haze.
- Measures flow rate of nitrogen supplied to prevent oxidation.
- Useful for replacing from a float meter or pressure gauge.
Pick-up and placement detection of miniature electrical or optical devices.
- Can be installed close to the pick-up nozzle.
- Fast response is suitable for pick-up detection.
- Measures slight differences in flow rate which cannot be detected by pressure.
- Not affected by fluctuation in suction pressure, thanks to mass flow measurement.Clogged or crushed nozzle is detectable by analog output.
![photo](https://www.azbil.com/products/factory/factory-product/flowmeter/mass-flow-sensor/mcs100/images/photo_1.gif)
![Glaph3](https://www.azbil.com/products/factory/factory-product/flowmeter/mass-flow-sensor/mcs100/images/Glaph3.gif)
Accessories
Multi channel indicator model MCW401
![MCW](https://www.azbil.com/products/factory/factory-product/flowmeter/mass-flow-sensor/mcs100/images/MCW.gif)
Designed for remotely display unit with up to 4pcs MCS100. It also produces open collector switch output. Additionally, by means of RS-232C communication, PC or PLC can be used to set parameter and to view instantaneous flow value and switch status of each channel. 4 types of “Window comparator mode” suitable for pick-up & placing applications and “Hysteresis mode” suitable for general flow monitoring, as switching operation.
Model MCW401 can be applied with below MCS100 models:
- MCS100A100
- MCS100A104
- MCS100A108
- MCS100A112
- MCS100A120
- MCS100A128